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IJAT Vol.9 No.5 pp. 588-592
doi: 10.20965/ijat.2015.p0588
(2015)

Paper:

Development of a Wide-Range Precision Positioning Sensor Based on Image Analysis of Diffracted Light

Yoshihisa Uchida

Department of Mechanical Engineering, Aichi Institute of Technology
1247 Yachigusa, Yakusa-cho, Toyota 470-0392, Japan

Received:
January 16, 2015
Accepted:
June 29, 2015
Published:
September 5, 2015
Keywords:
displacement sensor, positioning control, image analysis, interference
Abstract

We propose a wide-range micro- and nano-positioning sensor based on an image sensor. The intensity distribution of a Moiré signal is measured on the image sensor and used for position sensing via Fast Fourier Transform (FFT) analysis. The FFT returns the frequency spectra and phase characteristics of the image. The frequencies caused by the beam divergence, the order of diffraction, and the Moiré signal can then be identified. The sensor can detect position with high accuracy using the phase shift of the Moiré signal. The results also demonstrate a measurement range of up to 6 mm and an estimated standard deviation of 3.3 nm under specified conditions. Moreover, the target position can be set arbitrarily by automatic PI control. This positioning sensor is characterized as using only one sensor to detect position with a high accuracy over a wide measurement range, making it easy to install in existing industrial machines and tools. Moreover, the accuracy and the measurement range are selectable by choosing the appropriate frequency component.

Cite this article as:
Y. Uchida, “Development of a Wide-Range Precision Positioning Sensor Based on Image Analysis of Diffracted Light,” Int. J. Automation Technol., Vol.9, No.5, pp. 588-592, 2015.
Data files:
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