Pneumatic Servo Bearing Actuator with Multiple Bearing Pads for Ultraprecise Positioning
Shuhei Tsujimura*, Yusuke Hashimoto*, Takashi Matsuoka**,
Tomoko Hirayama**, and Katsumi Sasaki***
*Graduate School of Mechanical Engineering, Doshisha University, 1-3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0394, Japan
**Department of Mechanical Engineering, Doshisha University, 1-3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0394, Japan
***Pneumatic Servo Controls Ltd., 2266-22 Anagahora, Shimo-Shidami, Moriyama-ku, Nagoya 463-0003, Japan
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