IJAT Vol.7 No.2 pp. 196-204
doi: 10.20965/ijat.2013.p0196


Design and Analysis of a Thin Film Permanent Magnet Actuated Micro Pump

Chao Zhi*, Tadahiko Shinshi*, and Minoru Uehara**

*Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan

**Magnetic Materials Research Laboratory, Hitachi Metals, Ltd., 2-15-17 Egawa, Shimamoto-cho, Mishima-Gun, Osaka 618-0013, Japan

December 19, 2012
January 24, 2013
March 5, 2013
TFPM, closed magnetic circuit, PDMS, large deformation analysis, bubble tolerant
In this paper we present the design, analysis and an experimental evaluation of a micro pump utilizing a 20 µm thick, 3 mm diameter Thin Film Permanent Magnet (TFPM). The pump includes an electromagnet that uses a magnetic closed circuit. The design of the electromagnet was optimized and was theoretically explained. A PolyDiMethylSiloxane (PDMS) diaphragm with a thickness of approximately 80 µm was used in the pump. The electromagnetic force on the diaphragmwas calculated using a finite elementmethod. Large deformation analysis was used to calculate the displacement of the diaphragm. The force and displacement measurements agreed well with those calculated by simulation. The performance of the fabricated pump was also evaluated. During pumping, the displacement of the diaphragm reached 500 µm, which is the same as the height of the chamber. Furthermore, because of the large displacement, the pump is bubble tolerant and self-priming. A maximum flow rate of 50 µL/min and a maximum pressure of 110 Pa were achieved. A square wave input signal was demonstrated to be more effective than a sinusoidal signal in generating a high flow rate.
Cite this article as:
C. Zhi, T. Shinshi, and M. Uehara, “Design and Analysis of a Thin Film Permanent Magnet Actuated Micro Pump,” Int. J. Automation Technol., Vol.7 No.2, pp. 196-204, 2013.
Data files:
  1. [1] G. M. Whitesides, “The origins and the future of microfluidics,” Nature, Vol.442, pp. 368-373, Jul. 2006.
  2. [2] C. Yamahata, C. Lotto, E. Al-Assaf, and M. Gijs, “A PMMA valveless micropump using electromagnetic actuation,” Microfluidics and Nanofluidics, Vol.1, pp. 197-207, Jul. 2005.
  3. [3] V. Dau, T. Dinh, X. Nguyen, R. Amarasinghe, K. Tanaka, and S. Sugiyama, “Microfluidic Valveless Pump Actuated by Electromagnetic Force,” Proc. of IEEE SENSORS, pp. 679-682, Oct. 2009.
  4. [4] C. Zhi, T. Shinshi, and M. Uehara, “A MEMS Pump Driven by Thin Film Permanent Magnet,” J. of Advanced Mechanical Design, Systems, and Manufacturing, Vol.6, pp. 1180-1189, Nov. 2012.
  5. [5] M. Uehara, “Microstructure and permanent magnet properties of a perpendicular anisotropic NdFeB/Ta multilayered thin film prepared by magnetron sputtering,” J. of Magnetism and Magnetic Materials, Vol.284, No.1-3, pp. 281-286, Jun. 2004.
  6. [6] A. Olsson, G. Stemme, and E. Stemme, “Diffuser-element design investigation for valve-less pumps,” Sensors and Actuators, A, Vol.57, No.2, pp. 137-143, Nov. 1996.
  7. [7] N. Suzuki, S. Kiba, Y. Kamachi, N. Miyamoto, and Y. Yamauchi, “Mesoporous silica as smart inorganic filler: preparation of robust silicone rubber with low thermal expansion property,” J. of Materials Chemistry, Vol.21, No.14, pp. 5338-5344, Feb. 2011.
  8. [8] M. H. Lu and Y. P. Zheng, “Indentation test of soft tissues with curved substrates: A finite element study,” Medical and Biological Engineering and Computing, Vol.42, No.4, pp. 535-540, Jul. 2004.
  9. [9] M. Richter, R. Linnemann, and P. Woias, “Robust design of gas and liquid micropumps,” Sensors and Actuators, A, Vol.68, No.1-3, pp. 480-486, Jun. 1998.
  10. [10] A. Feustel, O. Krusemark, and J. Muller, “Numerical simulation and optimization of planar electromagnetic actuators,” Sensors and Actuators, A, Vol.70, No.3, pp. 276-282, Oct. 1998.
  11. [11] Y. Zhou and F. Amirouche, “An Electromagnetically-Actuated All-PDMS Valveless Micropump for Drug Dilivery,” Micromachines, Vol.2, pp. 345-355, Jul. 2011.

*This site is desgined based on HTML5 and CSS3 for modern browsers, e.g. Chrome, Firefox, Safari, Edge, Opera.

Last updated on May. 19, 2024