IJAT Vol.5 No.6 pp. 862-865
doi: 10.20965/ijat.2011.p0862


Optical Analysis of an Optical Probe for Three-Dimensional Position Detection of Micro-Objects

SungHo Jang, Takemi Asai, Yuki Shimizu,
and Wei Gao

Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University, 6-6-01 Aramaki, Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan

May 9, 2011
June 16, 2011
November 5, 2011
positioning, micro-cutting tool, optical sensor, focused laser beam, measurement
In this paper, the relationship between the photodetector outputs and the three-dimensional (3D) positioning of a micro-object in an optical probe is first analyzed based on geometric optics. In the optical model established for the analysis, a collimated laser beam is focused by an objective lens to generate a small beam spot at the focal position and a thin and rectangular micro-object is set close to the focal position. The influence of diffraction of the laser beam is investigated based on a model based on wave optics.
Cite this article as:
S. Jang, T. Asai, Y. Shimizu, and W. Gao, “Optical Analysis of an Optical Probe for Three-Dimensional Position Detection of Micro-Objects,” Int. J. Automation Technol., Vol.5 No.6, pp. 862-865, 2011.
Data files:
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