IJAT Vol.5 No.2 pp. 120-125
doi: 10.20965/ijat.2011.p0120


Measurement of Long-Term Dimensional Stability of Glass Ceramics Using a High-Precision Line Scale Calibration System

Akira Takahashi

Instruments Company, Nikon Corporation, 471 Nagaodai, Sakae, Yokohama, Kanagawa 244-8533, Japan

November 29, 2010
December 22, 2010
March 5, 2011
length measurement, line scale, long-term stability, secular change, glass ceramics
Length measurement was conducted for two years on glass ceramics, Zerodur® and Clearceram®, which have a low coefficient of thermal expansion, and on synthetic quartz. Commercially available glass ceramics were used for evaluating long-term stability, or secular change. Synthetic quartz ensured longterm length measurement stability. Two line scales of 300 mm length made of each material for a total of six line scales were simultaneously manufactured and measured to evaluate dimensional stability variation of the materials over time. Measurements were conducted with a line scale calibration systemdeveloped by Nikon. The calibration system is a onedimensional laser interferometer, featuring reduced Abbe’s errors, laser interferometer paths in a vacuum and real-time wavelength calibration of laser frequency using a 633 nm iodine-stabilized He-Ne laser. Long-term quartz stability was 4.3 nm and 5.4 nm (2σ). The yearly stability coefficients of the two glassceramic scales were -0.22 and -0.23 parts per million per year (ppm/yr) for Zerodur and -0.16 and -0.16 ppm/yr for Clearceram. No significant difference in stability between the two scales was observed for Zerodur or Clearceram.
Cite this article as:
A. Takahashi, “Measurement of Long-Term Dimensional Stability of Glass Ceramics Using a High-Precision Line Scale Calibration System,” Int. J. Automation Technol., Vol.5 No.2, pp. 120-125, 2011.
Data files:
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