Optical Mold Cleaning Using Carbon Dioxide
Jian-Shian Lin*,**, Chieh-Lung Lai*, Hsiu-Jen Lin*,
Ya-Chun Tu*, and Yoshimi Takeuchi**
*Mechanical and System Research Laboratories, Industrial Technology Research Institute, 195 Chung Hsing Rd., Sec.4 Chu Tung, HsinChu, Taiwan 310, R.O.C.
**Department of Mechanical Engineering, Osaka University, Yamadaoka 2-1, Suita, Osaka 565-0871, Japan
An optical mold cleaning technique comprised of supercritical CO2 fluids and a CO2 snow particle cleaning process is proposed in this paper. Our results indicate that using supercritical CO2 fluids with cosolvents significantly improves cleaning effectiveness. There is a high degree of cleaning efficiency even when supercritical CO2 fluids are used alone, without any cosolvents. We have also determined that two key factors in controlling the effectiveness of the CO2 snow cleaning process are the density and pressure of the CO2 propellant. Since CO2 cleaning generates much less pollution than current methods, it will be an important cleaning technique in the future.
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