Paper:
Optical Mold Cleaning Using Carbon Dioxide
Jian-Shian Lin*,**, Chieh-Lung Lai*, Hsiu-Jen Lin*,
Ya-Chun Tu*, and Yoshimi Takeuchi**
*Mechanical and System Research Laboratories, Industrial Technology Research Institute, 195 Chung Hsing Rd., Sec.4 Chu Tung, HsinChu, Taiwan 310, R.O.C.
**Department of Mechanical Engineering, Osaka University, Yamadaoka 2-1, Suita, Osaka 565-0871, Japan
- [1] V. Camel, A. Tambute, and M. Caude, “Analytical-Scale Supercritical Fluid Extraction: a Promising Technique for the Determination of Pollutants in Environmental Matrices,” J. Chromatography, Vol.642, pp. 263-281, 1993.
- [2] J. M. David et al., “Supercritical Fluid Cleaning Process for Precision Surfaces,” United States Patent 6, 602, 349, 2003.
- [3] M. A. McHugh and V. J. Krukonis, “Supercritical Fluid Extraction Principles and Practice,” Butterworth publisher, 1986.
- [4] E. Bok, D. Kelch, K. S. Schumacher, “Supercritical Fluids for Single Wafer Cleaning,” Solid State Technology, Vol.35, pp. 117-120, 1992.
- [5] J. B. Rubin, L. B. Davenhall, C. M. Taylor, L. D. Sivils, and T. Pierce, “CO2-Based Supercritical Fluids as Replacements for Photoresist-Stripping Solvents,” Los Alamos Nation Lab, 1998.
- [6] K. C. Zancan, M. O. Marques, A. J. Petenate, and M. A. Meireles, “Extraction of Ginger Oleoresin with Carbon Dioxide and Co-Solvents : A Study of the Antioxidant Action of the Extracts,” Journal of Supercritical Fluids, Vol.24, pp. 57-76, 2002.
- [7] M. C. Lin, M. J. Tsia, and K. C. Wen, “Supercritical Fluid Extractionof Flavonoids from Scutellariane Radix,” Journal of Chromatography A, Vol.830, pp. 387-395, 1999.
- [8] A. R. Berens, G. S. Huvard, R. W. Korsmeyer, F. W. Kkunig, “Application of Compressed Carbon Dioxide in the Incorporation ofAdditives into Polymers,” J. App. Polymer Sci. Vol.46, pp. 231-242,1992.
- [9] R. Z. Richard, “CO2 Snow Cleaning of Optics: Curing the Contamination Problem,” The International Society for Optical Engineering, Vol.4096, pp. 82-100, 2000.
- [10] S. Robert and A. Paul, “Carbon Dioxide Snow Cleaning — The Next Generation of Clean,” Precision Cleaning ’95 Proceedings, pp. 271-300, 1996.
- [11] S. Robert, “Carbon Dioxide Snow Cleaning,” Particles on Surfaces and Adhesion and Removal, pp. 221-237, 1999.
This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.