The Development of Object-Oriented SECS Communication Module Using Java, UML and Design Patterns
Yen-Hui Li*, Meng-Chang Chan**, and An-Chen Lee***
*Department of Testing Engineering, Novatek Microelectronics Corp.
**Department of 300mm Lithography Process, Winbond Electronics Corp.
***Department of Mechanical Engineering, National Chiao Tung University, Taiwan, R.O.C., 1001 Ta Hsueh Road, Hsinchu 30049, Taiwan
This paper develops an SECS Communication Module, which conforms to SEMI standard, using the Object-oriented Analysis/Design (OOA/D) method. The two main features of SECS Communication Module are Unified Modeling Language (UML) and Design Patterns for developing flexible and reusable software architecture and JAVA program language for implementing SECS Communication Module. The developed SECS communication module can not only be integrated into cluster tool control but can also run stand-alone in a communication equipment.
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