IJAT Vol.2 No.1 pp. 4-11
doi: 10.20965/ijat.2008.p0004


Nanometer-/Subnanometer-Positioning Technology Using Feeding Mechanism

Jiro Otsuka

Department of Mechanical Engineering, Faculty of Science and Technology, Shizuoka Institute of Science and Technology, 2200-2 Toyosawa, Fukuroi, Shizuoka 437-8555, Japan

September 3, 2007
November 15, 2007
January 5, 2008
ultraprecision positioning, nanometer positioning, nanotechnology, ball screw, linear motor
Positioning devices with nanometer resolution, although not yet widely used, will be used to test nextgeneration LSI, DVD, DNA, etc., expected to become within the next 5 to 10 years. We review nanometer and subnanometer positioning accuracy and resolution technologies, focusing on feed mechanisms using ball screws and linear motors, together with microprocessor-controlled displacement sensors for positioning feedback control.
Cite this article as:
J. Otsuka, “Nanometer-/Subnanometer-Positioning Technology Using Feeding Mechanism,” Int. J. Automation Technol., Vol.2 No.1, pp. 4-11, 2008.
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