Nanometer-/Subnanometer-Positioning Technology Using Feeding Mechanism
Department of Mechanical Engineering, Faculty of Science and Technology, Shizuoka Institute of Science and Technology, 2200-2 Toyosawa, Fukuroi, Shizuoka 437-8555, Japan
Positioning devices with nanometer resolution, although not yet widely used, will be used to test nextgeneration LSI, DVD, DNA, etc., expected to become within the next 5 to 10 years. We review nanometer and subnanometer positioning accuracy and resolution technologies, focusing on feed mechanisms using ball screws and linear motors, together with microprocessor-controlled displacement sensors for positioning feedback control.
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