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IJAT Best Paper Award 2014
IJAT BEST PAPER AWARD 2014 Positioning Characteristics of a MEMS Linear Motor Utilizing a Thin Film Permanent Magnet and DLC Coating Ryogen Fujiwara, Tadahiko Shinshi, and Minoru Uehara |
Ryogen Fujiwara Tokyo Institute of Technology | Tadahiko Shinshi Tokyo Institute of Technology | Minoru Uehara Hitachi Metals, Ltd. |