Development of Minimally Invasive Microneedle Made of Tungsten – Sharpening Through Electrochemical Etching and Hole Processing for Drawing up Liquid Using Excimer Laser –
Takahiro Tanaka, Tomokazu Takahashi, Masato Suzuki,
and Seiji Aoyagi
Kansai University, 3-3-35 Yamate-cho, Suita, Osaka 564-8680, Japan
A tungsten needle was fabricated by electrochemically etching a thin wire with a diameter of 100 µm, with the goal of using it in minimally invasive medical treatments. The sharpness and smoothness of the tip were effective for easy insertion because they provided a large stress concentration and small amount of friction, respectively. An experiment involving the insertion of the fabricated needle into artificial skinmade of silicone rubber was carried out. The resistance force during the insertion was greatly reduced because of the small size of the needle, which was comparable to a mosquito’s proboscis. Despite the ultra-thin shape, the microneedle neither buckled nor broke because of the high hardness of the tungsten material. A hole was fabricated in the tungsten needle using excimer laser processing and electrochemical etching. Water and blood sampling were successfully achieved using this needle.
and Seiji Aoyagi, “Development of Minimally Invasive Microneedle Made of Tungsten – Sharpening Through Electrochemical Etching and Hole Processing for Drawing up Liquid Using Excimer Laser –,” J. Robot. Mechatron., Vol.25, No.4, pp. 755-761, 2013.
-  S. Henry, D. V. McAllister, M. G. Allen, and M. R. Prausnitz, “Micromachined Needles for the Transdermal Delivery of Drugs,” Proc. MEMS’98, pp. 494-498, 1998.
-  P. K. Campbell, K. E. Jones, R. J. Huber, K. W. Horch, and R. A. Normann, “A Silicon-Based, Three-Dimensional Neural Interface: Manufacturing Processes for an Intracortical Electrode Array,” IEEE Trans. Biomed. Eng., Vol.38, No.8, pp. 758-768, 1991.
-  P. Griss, P. Enoksson, K. T. Laakso, P. Merilainen, S. Ollmar, and G. Stemme, “Spiked Biopotential Electrodes,” Proc. MEMS’00, pp. 323-328, 2000.
-  M. Shikida, M. Ando, Y. Ishihara, N. Yamaura, T. Ando, K. Sato, and K. Asaumi, “Fabrication of Pen-Shaped Microneedle Structure by Using Non-Photolithographic Pattern Transfer,” Proc. Transducers ’03, pp. 1671-1674, 2003.
-  D. V.McAllister, F. Cross, S. P. Davis, L.M.Matta, M. R. Prausnitz, andM. G. Allen, “Three-Dimensional Hollow Microneedle and Microtube Arrays,” Proc. Transducers ’99, pp. 1098-1101, 1999.
-  S. P. Davis, M. R. Prausnitz, and M. G. Allen, “Fabrication and Characterization of Laser Micromachined Hollow Microneedles,” Proc. Transducers ’03, pp. 1435-1438, 2003.
-  H. Yagyu, S. Hayashi, and O. Tabata, “Fabrication of Plastic Micro Tip Array using Laser Micromachining of Nanoparticles Dispersed Polymer and Micromolding,” IEEJ Trans. SM, Vol.126, No.1, pp. 7-13, 2006.
-  J. Park, S. Davis, Y. Yoon, M. R. Prausnitz, and M. G. Allen, “Micro machined Biodegradable Microstructures,” Proc. MEMS’03, pp. 371-374, 2003.
-  S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama, “Alignment X-ray Lithography for Hole Perforating through PCTMicroneedle,” Proc. Sensor Symposium ’04, pp. 497-500, 2004.
-  N. Matsuzuka, Y. Hirai, and O. Tabata, “Prediction Method of 3-D Shape Fabricated by Double Exposure Technique in Deep X-ray Lithography (D2XRL),” Proc. MEMS’06, pp. 186-189, 2006.
-  S. J. Moon and S. S. Lee, “Fabrication of Microneedle Array using Inclined LIGA Process,” Proc. Transducers ’03, pp. 1546-1549, 2003.
-  K. Najafi, J. Ji, and K. D. Wise, “Scaling Limitations of Silicon Multichannel Recording Probes,” J. Biomed. Eng., Vol.37, No.1, pp. 1-11, 1990.
-  S. Chandrasekaran, J. D. Brazzle, and A. B. Frazier, “Surface Micromachined Metallic Microneedles,” J. MEMS, Vol.12, No.3, pp. 281-288, 2003.
-  K. Oka, S. Aoyagi, Y. Arai, Y. Isono, G. Hashiguchi, and H. Fujita, “Fabrication of a Micro Needle for a Trace Blood Test,” Sensors and Actuators, Vol.97-98C, pp. 478-485, 2002.
-  H. Izumi and S. Aoyagi, “Novel Fabrication Method for Long Silicon Microneedles with Three-Dimensional Sharp Tips and Complicated Shank Shapes by Isotropic Dry Etching,” IEEJ Trans. Electrical and Electronic Eng., Vol.2, pp. 328-334, 2007.
-  H. Izumi, T. Tsubasa, S. Aoyagi, N. Tagawa, Y. Arai, M. Hirata, and S. Yorifuji, “Combined Harpoonlike Jagged Microneedles Imitating Mosquito’s Proboscis and Its Insertion Experiment with Vibration,” IEEJ Trans. on Electrical and Electronic Engineering, Vol.3, No.4. pp. 425-431, 2008.
-  H. Izumi, M. Suzuki, S. Aoyagi, and T. Kanzaki, “Realistic Imitation of Mosquito’s Proboscis: Electrochemically Etched Sharp and Jagged Needles and Their Cooperative Inserting Motion,” Sensors and Actuators, Vol.A165, No.1, pp. 115-123, 2011.
-  S. Aoyagi, H. Izumi, and M. Fukuda, “Biodegradable Polymer Needle with Various Tip Angles and Consideration on Insertion Mechanism of Mosquito’s Proboscis,” Sensors and Actuators, Vol.A143, pp. 20-28, 2008.
-  C. Huang, T. Tanaka, Y. Takaoki, H. Izumi, T. Takahashi, M. Suzuki, and S. Aoyagi, “Fabrication of Metallic Microneedle by Electroplating and Sharpening of it by Electrochemical Etching,” IEEJ Trans. MS, Vol.131, No.11, pp. 373-380, 2011.
-  H. Izumi, T. Okamoto, M. Suzuki, and S. Aoyagi, “Development of a Silicon Microneedle with Three-Dimensional Sharp Tip by Electrochemical Etching,” IEEJ Trans. SM, Vol.129, No.11, pp. 373-379, 2009.
-  T. Nishiyama, K. Nakamura, K. Kobayakawa, Y. Sato, S. Tamura, and N. Koura, “Fabrication of STMTip by Electrochemical Etching Method,” Electrochemistry, Vol.63, No.3, pp. 230-233, 1995.
This article is published under a Creative Commons Attribution-NoDerivatives 4.0 International License.
Copyright© 2013 by Fuji Technology Press Ltd. and Japan Society of Mechanical Engineers. All right reserved.