Paper:
Implementation of in Process Surface Metrology for R2R Flexible PV Barrier Films
Mohamed Elrawemi*,**, Liam Blunt**, Hussam Muhamedsalih**, Feng Gao**, and Leigh Fleming**
*Mechanical Engineering Department, Elmergib University
Alkhoms, P.O.BOX 40414, Libya
**Centre for Precision Technologies, University of Huddersfield
Huddersfield, HD1 3DH, UK
In this paper, the implementation of in process inspection system capable of detecting surface defects such as pinholes, scratches, or particles down to a lateral size of 3 µm and a vertical resolution of 10 nm over a 500 mm barrier width is presented. The system has a built-in environmental vibration compensation capability, and can monitor ALD-coated films manufactured using roll-to-roll (R2R) techniques. Ultimately, with the aid of this in process measurement system, it should be possible to monitor the coating surface process of large-area substrates, and if necessary, carry out remedial work on the process parameters.
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