Fabrication of Titanium-Based Hard Coatings by Atmospheric Microplasma-Metal Organic Chemical Vapor Deposition Using Titanium Tetraisopropoxide
Tsunehisa Suzuki*, Mutsuto Kato*, and Yoshiki Shimizu**
*Yamagata Research Institute of Technology, 2-2-1 Matsuei, Yamagata 990-2473, Japan
**National Institute of Advanced Industrial Science and Technology, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8561, Japan
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