Sensorless Force Control for High-speed Pressurization
Shigeyasu Kawaji*, Fuminori Ozaki** and Ryutaro Higashi*
*Graduate School of Science and Technology Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan
**Industrial Automation Company, OMRON Corporation Shiokoji Horikawa, Shimogyoku, Kyoto 600-8530, Japan
Force control technology needs a breakthrough to be used for practical purposes because it is rarely used in the industry although it is being improved in academic circles. We propose solving problems of conventional position control in pressurization using high-speed sensorless force control for the IC testing handler used in semiconductor manufacturing. The key techniques to solve the problem are piecewise polynomial trajectory generation to meet needs for high-speed operation, a model-following force servo to achieve pressurizing conditions, and a disturbance observer to estimate pressurization. The effectiveness of the proposed method is confirmed in experiments.
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