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JRM Vol.13 No.3 pp. 222-229
doi: 10.20965/jrm.2001.p0222
(2001)

Paper:

Sensorless Force Control for High-speed Pressurization

Shigeyasu Kawaji*, Fuminori Ozaki** and Ryutaro Higashi*

*Graduate School of Science and Technology Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan

**Industrial Automation Company, OMRON Corporation Shiokoji Horikawa, Shimogyoku, Kyoto 600-8530, Japan

Received:
December 25, 2000
Accepted:
January 22, 2001
Published:
June 20, 2001
Keywords:
sensorless force control, high-speed pressurization, IC testing, MFS, disturbance observer
Abstract

Force control technology needs a breakthrough to be used for practical purposes because it is rarely used in the industry although it is being improved in academic circles. We propose solving problems of conventional position control in pressurization using high-speed sensorless force control for the IC testing handler used in semiconductor manufacturing. The key techniques to solve the problem are piecewise polynomial trajectory generation to meet needs for high-speed operation, a model-following force servo to achieve pressurizing conditions, and a disturbance observer to estimate pressurization. The effectiveness of the proposed method is confirmed in experiments.

Cite this article as:
Shigeyasu Kawaji, Fuminori Ozaki, and Ryutaro Higashi, “Sensorless Force Control for High-speed Pressurization,” J. Robot. Mechatron., Vol.13, No.3, pp. 222-229, 2001.
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