Development of Ultrasonic Vibration-Assisted Magnetic Compound Fluid (MCF) Polishing Technology
Mitsuyoshi Nomura*,, Kenji Ozasa*, Tatsuya Fujii*, Tsunehisa Suzuki*, and Yongbo Wu**
*Department of Mechanical Engineering, Akita Prefectural University
84-4 Ebinokuchi, Tsuchiya, Yurihonjo, Akita 015-0055, Japan
**Department of Mechanical and Energy Engineering, Southern University of Science and Technology, Shenzhen, China
This study investigates the development of an ultrasonic vibration-assisted magnetic compound fluid (MCF) polishing technology for final polishing. The fabrication of an experimental apparatus entails an ultrasonic polishing unit, and the experimental investigation of its performance in surface polishing is described. In addition, ultrasonic vibration-assisted MCF polishing under different applied methods of ultrasonic vibration is studied. The experimental results indicate that applying ultrasonic vibration to the workpiece improves the surface roughness and material removal rate when the ultrasonic vibrations are changed. In addition, across the range of polishing conditions employed in this study, the precision surface roughness and high material removal rate can be easily obtained on the acrylic plate by applying an elliptical vibration to the ultrasonic vibration.
-  G. K. Skinner, “Diffractive/refractive optics for high energy astronomy,” Astronomy and Astrophysics, Vol.375, pp. 691-700, 2001.
-  J. Yan, K. Watanabe, and Y. Nakagawa, “Fabrication of Thin-Film Fresnel Optics by Combining Diamond Turning and Photolithographic Processes,” Int. J. Automation Technol., Vol.7, No.4, pp. 385-390, 2013.
-  H. Suzuki, T. Higuchi, N. Wajima, T. Kitajima, S. Okuyama, and H. Yamazaki, “Precision Grinding of Micro Fresnel Lens Molding Die – Feasibility Study on Precision Grinding of Tungsten Carbide –,” J. of the Japan Society for Precision Engineering, Vol.65, No.8, pp. 1163-1168, 1999 (in Japanese).
-  H. Suzuki, “Multi-Axis Controlled Ultraprecision Machining and Measurement,” Int. J. Automation Technol., Vol.3, No.3, pp. 227-232, 2009.
-  S. Yamamoto, M. Hirano, K. Nakamoto, T. Ishida, and Y. Takeuchi, “Study on Precision Machining of Glass Lens Mold with Minute Structures (2nd Report),” J. of the Japan Society for Precision Engineering, Vol.76, No.1, pp. 85-89, 2010 (in Japanese).
-  E. Brinksmeier and O. Riemer, “Deterministic production of complex optical elements,” Int. J. of Prod. Eng. Comput., Vol.4, No.5, pp. 63-72, 2002.
-  W. Kordonski and D. Golini, “Progress Update in Magnetorheological Finishing,” Int. J. of Mod. Phys. B, Vol.13, No.14n16, pp. 2205-2212, 1999.
-  S. Ogawa1, E. Aoyama, T. Hirogaki, Y. Onchi, and K. Oku, “Nano-Mirror Surface Generation for Hardened Steel Using Ultra-Low Pressure Super-Finishing,” Int. J. Automation Technol., Vol.3, No.4, pp. 433-444, 2009.
-  A. Gessenharter, O. Riemer, and E. Brinksmeier, “Polishing processes for structured surfaces,” Proc. of the 18th ASPE, 2003.
-  E. Brinksmeier, O. Riemer, and A. Gessenharter, “Finishing of structured surfaces by abrasive polishing,” Precision Engineering, Vol.30, No.3, pp. 325-336, 2006.
-  H. Nishida, K. Shimada, Y. Ido, N. Momose, and H. Yamamoto, “Characteristics of precision polishing for flat and concave surfaces of part of a spherical pit controlled by a magnetic field,” J. of the Japan Society for Abrasive Technology, Vol.61, No.12, pp. 666-673, 2017.
-  C. H. Lim, K. B. Kim, S. H. Lee, and J. I. Lee, “Surface polishing of three dimensional microstructures,” Proc. of 17th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS), pp. 709-712, 2004.
-  W. B. Kim, S. H. Lee, and B. K. Min, “Surface Finishing and Evaluation of Three-Dimensional Silicon Microchannel Using Magnetorheological Fluid,” J. Manuf. Sci. Eng., Vol.126, No.4, pp. 772-778, 2005.
-  J. Seok, Y. J. Kim, K. I. Jang, B. K. Min, and S. J. Lee, “A study on the fabrication of curved surfaces using magnetorheological fluid finishing,” Int. J. of Machine Tools and Manufacture, Vol.47, No.14, pp. 2077-2090, 2007.
-  H. Kawakubo, U. Sato, and S. Murata, “Study on polishing performance of slurry discharge type magnetic polishing tool Finishing characteristics of non-ferromagnetic materials,” J. of the Japan Society for Abrasive Technology, Vol.58, No.4, pp. 247-252, 2014.
-  H. Morinaga and K. Tamai, “Polishing Technology for 3D Sapes/Various Materials,” J. of the Japan Society for Precision Engineering, Vol.84, No.3, pp. 235-238. 2018.
-  H. Guo, Y. Wu, D. Lu, M. Fujimoto, and M. Nomura, “Effects of pressure and shear stress on material removal rate in ultra-fine polishing of optical glass with magnetic compound fluid slurry,” J. of Materials Processing Technology, Vol.214, pp. 2759-2769, 2014.
-  K. Shimada, T. Fujita, H. Oka, Y. Akagami, and S. Kamiyama, “Hydrodynamic and magnetized characteristics of MCF (magnetic compound fluid),” Trans. of the Japan Society of Mechanical Engineers, Vol.67, pp. 3034-3040, 2001.
-  Y. Wu, T. Sato, W. Lin, K. Yamamoto, and K. Shimada, “Mirror surface finishing of acrylic resin using MCF-based polishing liquid,” Int. J. Abras. Technol., Vol.3, pp. 11-24, 2010.
-  H. Guo, Y. Wu, D. Lu, M. Fujimoto, and M. Nomura, “Ultrafine Polishing of Electroless Nickel-Phosphorus-Plated Mold with Magnetic Compound Fluid Slurry,” Materials and Manufacturing Processes, Vol.29, pp. 1502-1509, 2014.
-  Y. Wu, Y. Li, Z. Wang et al., “Performance improvement of chemo-mechanical grinding in single crystal silicon machining by the assistance of elliptical ultrasonic vibration,” Int. J. of Abrasive Technology, Vol.4, No.2, pp. 117-131, 2011.
-  M. Nomura, N. Makita, T. Fujii, and Y. Wu, “Effects of Water Supply Using Ultrasonic Atomization on the Working Life of MCF Slurry in MCF Polishing,” Int. J. Automation Technol., Vol.13, No.6, pp. 743-748, 2019.
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